Auger imaging parameter optimization

- Sample: Au/Si, AS121130d
- Si peak Auger images were constructed using Auger maps measured at 1616.5, 1635, and 1650 eV.
- Auger maps were measured changing Path energy and Scan time.
- As shown in Fig. 1, optimal path energy for Auger imaging of Si is 160 eV (CRR mode, CAE[eV]/CAE=10).

                                       Fig. 1. Si 1616.5 eV Auger peak height at varying path energy.



- As shown in Fig. 2, as scan time increases, Auger image quality gets better. 21.6 min scan time is enough to get good quality images.

  Fig. 2. Si 1616.5 eV Auger peak height at varying scan time.