Path energy optimization for Nano-auger

- Sample: Si/Au AS121130d
- Auger spectra was measured on (100) Si region at varying Path energy.
- CRR mode from 320 eV to 80 eV
- CAE mode from 70 eV to 5 eV

                                        Fig. 1. Auger spectra measured on Si at varying path energy.

     Fig. 2. Si 1616.5 eV peak intensity vs. path energy and Si 1616.5 eV peak height vs. background ratio.