Ion gun imaging

• Want to use external raster control for 20-066 ion gun control to allow SE imaging for focusing and alignment
• Omicron software does not allow external raster to be enabled
• Install PHI software (from floppy disk!!) version 3.0A 1997
• C:\program files\PHI\EXE
• edit IonGunCrtl.ini

[Ion Gun Control]

ComPort=COM6

RS485ResponseTime=1000

IgunAddress=3

NoHardware=0

ModelNumber=11-066

BlankingOptics=1

[END]

Com port set to COM6, address used by Omicron. Other params left at defaults

Software seems to work.

Pressure control

• Phi software does not generate setpoint voltage
• switch RVG50C Pfeiffer controller to INT setpoint
• knob 1.0 = 13 mPa
• 1.5 = 20 mPa
• 2.0 = 26.5 mPa
• Leak valve needs 2.0 turns for ~ 30 mPa (as of 12/2/13)

PHI software raster

raster is not centered on offset, ie changing raster size shifts sputter area

Y raster half of X gives approximate square image for 30 degree tilt sample