InSnO
sample commercial 25 mm fused quartz with ITO, defects and inhomogenieties visible in SEM
also piece of In 99.99% foil Goodfellow, exposed to ambient many months
Lots of C and O plus In.
ALD TiN
Deposited by Aaron and Adam, before 6/12/14, substrate??
See some C, Ti, O, N peak convolved with Ti
Clear difference spectra shape from metallic Ti (PHI Auger book)
Sputter 30 sec 15 mPa using PVi-ko3-Frank settings, modified from Changhyun
After sputter no C, Ar visible, 415:419 peak ratio changes, relative increase 419
previous marks, scan squares, point spots, disappear.
Cond 80, obj 59.5 2 kV no raster offset (-.2, -.7), specimen current 280 nA.
Only minor changes 2 more 30 sec sputter cycles, total 90s.
Now additional 90 sex
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