directory 121108 SiAu
Si reference
- Take SiO sputter sample to get Si reference. Look near region sputtered last week.
- Get Inlens detector working. At 3 kV, very bright region is SiO, darker regions SiC. No clean Si seen
- Sputter sample 2 kV 3x3 raster 20 mPa cond 66 obj 61 grid 150 30 degree tilt
Problem - sputter issues, sample current does not change much, no SE in Auger.
- almost no SE signal
- sample current 2 nA for 2 kV ions. Change to 2.5 kV, now 260 nA, reasonable SE signal 250 kHz CRR 5 at 80 eV
- 2500 V does give reasonable sputter rate. Remove C and O with ~ 150 sec sputter
- also discover software for FIG5 has timer for sputter...
Take reference spectra 121108 SiAu.aes, Si LVV and KLL regions at 3 kV and 10 kV.
- Si KLL ~ 1% peak for 3 kV, ~ 40% for 10 kV. Spectra in CRR and CAE
- Good quality Si data
No comments:
Post a Comment