Image tests

Auger Image Test

Si wafer plus oxide

Take auger spectra, zoom into 200x image region, left if image oxidized, right not oxidized.

Verify ImageJ can read 16 bit images, adjust contrast 0.16 DAC1 for CRR5 at 507

Image 9, 10 sequential 507 images, can check for noise

Image 11 is 523, image 12 is 533, 13 is InLens

Change to scan speed 14 512x384 image, 0.8 us/pixel, 2.8 min, record 507
Next 523 then 533.
Auger counts ~ 1 MHz, so 800 cts/pixel, SNR ~ 28

Take spectra at 50, 10, 2, 1 ms point to evaluate SNR, 1 ms is minimum interval, actual elapsed time >> than apparent time.

Processing

ImageJ reads images, can calculate differences, as float data to handle negatives. Reasonable Auger image of O KLL on Si.

• Calibrate Zeiss inputs. Image grey_test_02.tif is 16 bit, start at 1.0 V, descend in -.1 volt steps to 0, again 1.0, then -0.1
• 1 volt region is 4965 counts of 20724, 1756 of 20720.  No 21, 22 or 23. Must be 14 bit A/D
• 0 V is 1784 +/- 4
• if linear, 18.94 k/V. 0.21 mV/bit (14 bit) or 52.8 uV/bit (16 bit)
• min is -.094 V, max is 3.36 V
• 0.1 3582
• 0.2 5564 but spread over ~ 10 values
• .3 7240
• .4 9338
• .5 11258
• .6 13048
• .7  15032
• .8  16886
• .9 18846
• 3.0 V is 58386, 89.1%
• 0 is 1778, 2.7%
• 3.1 is 60278, 3.2 is 62168, 3.3 63976, 3.35 64988